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NLE Vacuum Compatible Linear Stage

The NLE Series is available in XY and XYZ configurations.

The vacuum compatible version of the NLE linear stage is dimensionally the same as the standard NLE. Every part of the stage has been modified to minimize virtual leaks and outgassing.

All aluminum parts are clear iridited, bearings are lubricated with Braycote 601EF grease, and all wires use teflon insulation. The stepper motor and linear encoder are specially designed for use vacuum applications. The fasteners are made of stainless steel and vented if used in blind holes to eliminate virtual leaks.

A vacuum compatible linear encoder is utilized to increase positioning accuracy.

The drive system utilizes a stainless steel ACME leadscrew with an Acetal plastic drive nut. The drive nut offers zero backlash operation that automatically adjusts for wear to insure zero backlash for the life of the stage.

The use of linear guide bearings provide a smooth motion with high load capacity and stiffness. Since the carriage is supported over the entire travel of the stage, a good cantilevered load capacity can be achieved.

Motor wires and encoder cables are 0.6 m (2 ft.) long.  The motor wires are terminated with a vacuum compatible DB-9 female connector and the encoder cable is terminated with a vacuum compatible DB-15 female connector.

Specifications
Maximum Travel Speed
Travel Range
50 mm, 100 mm, 150 mm, 200 mm, 250 mm,300 mm
Lead Screw
1.5875 mm lead, Stainless Steel
 
Encoder Resolution
0.1 µm
Repeatability
±0.5 µm (closed loop)
Accuracy
±3 µm / 100mm of travel (closed loop)
Maximum Load
22.6 Kg (50 lbs)
Maximum Speed
10 mm/sec
Stage Weight
NLE-50 = 2.7 KG (6 lbs) | NLE-100 = 2.9 KG (6.4 lbs) NLE-150 = 3.2 KG (7 lbs) | NLE-200 = 3.6 KG (8 lbs) NLE-250 = 3.9 KG (8.6 lbs) | NLE-300 = 4.2 KG (9.3 lbs)
Material
Aluminum
Finish
Clear Irridite
Vacuum Rating
10^-7 Torr
Operating Temperature
0°C to 50°C (motor case should not exceed 80°C)
Dimensions
NLE Series Vacuum Compatible Linear Stage NLE Series Vacuum Compatible Linear StageClick to Enlarge
Motor Options

NEMA17_Vacuum_Motor

NEMA 17 Vacuum Compatible Stepper Motor

All the paints and oils are removed from the motor. Next, high temperature windings are utilized as well as Teflon leads.

  • NEMA 17 high torque stepper motor
  • 0.95 Amp/Phase
  • 5.0 Ohm/Phase
  • 3.1 mH/Phase
  • 1.8 degrees/step
  • Compatible with the following motion controllers:
    NSC-A1 Series |NSC-G Series
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