The vacuum compatible version of the NLS4 linear stage is dimensionally the same as the standard NLS4. Every part of the stage has been modified to minimize virtual leaks and outgassing.
All aluminum parts are clear iridited, bearings are lubricated with Braycote 601EF grease, and all wires use teflon insulation. The stepper motor and limit switches are specially designed for use vacuum applications. The fasteners are made of stainless steel and vented if used in blind holes to eliminate virtual leaks.
The drive system utilizes a stainless steel ACME leadscrew with an Acetal plastic drive nut. The drive nut offers zero backlash operation that automatically adjusts for wear to insure zero backlash for the life of the stage.
The use of linear guide bearings provide a smooth motion with high load capacity and stiffness. Since the carriage is supported over the entire travel of the stage, a good cantilevered load capacity can be achieved.
Motor and signal wires are 0.6 m (24″) long and terminated with DB-9 connectors. Note, the DB-9 connectors are not vacuum compatible.
|Travel||50mm (2″), 100mm (4″), 150mm (6″), 200mm (8″), 250mm (10″), 300mm (12″), 350mm (14″), 400mm (16″), 500mm (20″), 600mm (24″)|
|Resolution||1.5875 mm/rev lead||0.03 µm @ 50,000 steps/rev motor resolution|
|6.35 mm/rev lead||0.13 µm @ 50,000 steps/rev motor resolution|
|Maximum Speed||1.5875 mm/rev lead||10 mm/second|
|6.35 mm/rev lead||50 mm/second|
|Maximum Load||22.6 kg (50 lb)|
|Repeatability Bidirectional||10 µm|
|Stage Weight||NLS4-2 = 1.3 kg (3 lb) | NLS4-4 = 2.1 kg (4.7 lb) | NLS4-6 = 2.4 kg (5.3 lb)|
|NLS4-8 = 2.5 kg (5.7 lb) | NLS4-10 = 2.8 kg (6.3 lb) | NLS4-12 = 3.1 kg (6.9 lb)|
|Operating Temperature||0°C to 70°C|
All the paints and oils are removed from the motor. Next, high temperature windings are utilized as well as Teflon leads.
NLS4 with Stepper Motor
NLS4-2 Vacuum Compatible (STEP)
NLS4-4 Vacuum Compatible (STEP)
NLS4-6 Vacuum Compatible (STEP)
NLS4-8 Vacuum Compatible (STEP)
NLS4-10 Vacuum Compatible (STEP)
NLS4-12 Vacuum Compatible (STEP)
NLS4-14 Vacuum Compatible (STEP)
NLS4-16 Vacuum Compatible (STEP)
NLS4-20 Vacuum Compatible (STEP)
NLS4-24 Vacuum Compatible (STEP)