The vacuum compatible version of the VS-15 vertical lift stage is dimensionally the same as the standard VS-15.
Every part of the stage has been modified to minimize virtual leaks and outgassing.
All aluminum parts are clear iridited, bearings are lubricated with Braycote 601EF grease, and all wires use teflon insulation. The stepper motor is specially designed for use in vacuum applications. The fasteners are made of stainless steel and vented if used in blind holes to eliminate virtual leaks.
The drive system utilizes a stainless steel ACME leadscrew with an Acetal plastic drive nut. The drive nut offers zero backlash operation that automatically adjusts for wear to insure zero backlash for the life of the stage.
The use of linear guide bearings provide a smooth motion with high load capacity and stiffness.
Motor and signal wires are 0.6 m (24″) long and terminated with DB-9 connectors. Note, the DB-9 connectors are not vacuum compatible. They are used for testing purposes.
Specifications
Aluminum
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Travel Range
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14 mm
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Lead Screw Pitch
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1.5875 mm/rev
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Resolution
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0.03 µm @ 50,000 steps/rev motor resolution
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Max. Speed
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5 mm/sec
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Maximum Load
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4.5 kg (10 lb.)
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Bidirectional Repeatability
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±3 µm
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Accuracy
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10 µm
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Stage Weight
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1.1 kg (2.5 lb.)
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Material
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|
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Finish
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Clear Irridite
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Vacuum Rating
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10^-7 Torr
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Operating Temperature
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0°C to 50°C (motor case should not exceed 80°C)
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Motor Options
NEMA 17 Vacuum Compatible Stepper Motor
All the paints and oils are removed from the motor. Next, high temperature windings are utilized as well as Teflon leads.
- NEMA 17 high torque stepper motor
- 0.95 Amp/Phase
- 5.0 Ohm/Phase
- 3.1 mH/Phase
- 1.8 degrees/step
- Compatible with the following motion controllers:
NSC-A1 Series |NSC-G Series